SEMI 2021 presentation
Challenges in advanced contaminant management from materials science perspective
Product R&D development dep.,
Chemicals div., Daikin Industries, Ltd.
At the SEMI 2021 conference, Mr.Hiroyuki Hamada, Senior scientist, Product R&D development dep., Chemicals div., Daikin Industries, Ltd., gave a lecture on the challenges of advanced pollutant management in the production process of semiconductor device manufacturing equipment from the perspective of materials science.
- Overview of the lifecycle of PFA in fluid handling
- Classification of contamination in wafer fabrication
- Metal contamination
- Particle contamination
- Conclusion/End remarks