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Semicon Etching Agents

DAIKIN provides high quaity etching agents for wet and dry fluorine types for semiconductor manufacturing. 

DESCRIPTION

DAIKIN provides etching agents for wet and dry fluorine types for semiconductor manufacturing. For wet etching agents, we provide high quality products in which impurities such as metal-ions, etc., are minimized. We also handle grades with improved permeability and reduced particle adhesion onto wafers by adding a unique surfactant.

GRADES & FEATURES

Wet Etching agent

Grades Features DOWNLOADS

Aqueous Hydrofluoric Acid (HF)

(50%, 49%)

High Quality Low impurity level

(metal content)

TECHNICAL DATA SHEET

Ammonium Fluoride (NH4F)

(40%)

TECHNICAL DATA SHEET

Buffered Hydrogen Fluoride

(BHF)

TECHNICAL DATA SHEET

Buffered Hydrogen Fluoride with Surface-active Agent

(BHF-U)

Improved permeability
Reduced particle adhesion

TECHNICAL DATA SHEET

Dry Etching agent

Grades Features DOWNLOADS
PFC-14 (CF4) High-Purity (More than 99.999 %) TECHNICAL DATA SHEET
PFC-116  (C2F6) TECHNICAL DATA SHEET
PFC-C318  (C4F8) TECHNICAL DATA SHEET
HFC-23  (CHF3) TECHNICAL DATA SHEET
HFC-32  (CH2F2) TECHNICAL DATA SHEET

INDUSTRIES

Semicon

Semiconductor

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