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DAIKIN SOLUTIONS > Industries > Semiconductor manufacturing > Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

semi-equipment2

Materials for semiconductor manufacturing equipment require a high level of cleanliness to prevent contamination of the ultra-high-purity chemicals used, while maintaining the required standards of safety and durability.

Tubes, Fittings and Plastic parts

Required characteristics

- Stress crack resistance

- Chemical resistance

- Excellent mechanical strength

- High cleanliness

Daikin Solutions

Daikin’s Fluoropolymer NEOFLON PFA AP-Series has the chemical resistance of fluoro materials, along with excellent stress crack resistance and a high level of cleanliness. This allows NEOFLON PFA to achieve a long life and high reliability necessary in tube fitting systems. Daikin’s Fluoropolymer NEOFLON PCTFE M-Series is excellent for mechanical strength and cleanliness, making it the best choice for plastic made parts.

Sealing materials

Required characteristics

- Heat resistance

- Plasma resistance

- Fluorine radical durability

- Low dust generation

- Chemical resistance

- Vacuum sealability

- Non sticking

Daikin Solutions

Fluoro elastomer sealants are used for equipment placed in harsh conditions, such as plasma etching equipment. Daikin Industries developed an O-ring seal material, "DUPRA", made of perfluoro elastomer for these applications. DUPRA is provided by Toho Kasei, under license from Daikin.

High barrier tubes

Required characteristics

- Chemical resistance

- Low chemical permeability

- Gas barrier properties

- High cleanliness

Daikin Solutions

Daikin’s Fluoropolymer NEOFLON CPT LP series has excellent low chemical permeability and gas barrier properties. When used in tubing, the permeation of chemicals and gas is greatly reduced, effectively minimizing any adverse impact on peripheral devices. In addition, tube deterioration is suppressed, and the increased durability leads to a longer device life.